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Cover image for book Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications

Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications

By:Filipe Vaz, Nicolas Martin, Martin Fenker
Publisher:Bentham Science Publishers Ltd.
Print ISBN:9781608051571
eText ISBN:9781608051564
Edition:1
Format:Page Fidelity

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